指标优势

1.性能高 High performance
处理容量大，能耗低，性能高；
Large processing capacity, low energy consumption, high performance;


2.寿命长 Long Life
拥有阴阳极发明专利，寿命长，目前已达到了一年以上，并且已在市场上验证应用5年；
With anode and cathode invention patent, long life, has reached more than one year, and has been verified in the market for 5 years.


3.操作简单 Simplicity Of Operator
运行操作简单，界面简洁明了。
The operation is simple, the interface is concise and clear.



4.气体处理效率高 High Gas Treatment Efficiency
气体处理效率高，界面操作简洁明了，目前气体处理率(NH3,B2H6,SiH4,PH3,H2,TMA)>99% ，( N2O ,NF3)>95% ；
High gas treatment efficiency, simple interface operation, current gas treatment rate (NH3,B2H6,SiH4,PH3,H2,TMA)> 99%, (N2O,NF3)> 95%;


5.安全性高 High Security
设备安全性高,设备采用了多路的温度监控，温度异常立刻切断等离子火焰并报警，最大化的保护设备安全运行。目前通过了最新的SEMI S2认证，其中的S6毒性测试的仪器全国只有2台；
Equipment safety is high, the equipment adopts multi-channel temperature monitoring, temperature abnormal immediately cut off the plasma flame and alarm, maximize the protection of equipment safe operation. At present, it has passed the latest SEMI S2 certification, of which there are only two S6 toxicity testing instruments in the country


6.精度高 High Precision
精度高，能达到10PPT的级别，一般的毒性测试精度是ppb级别，达到目前仪器精度领先水平，经过了更严苛的测试来保证客户的人生财产安全。
High accuracy, can reach the level of 10PPT, the general toxicity test accuracy is ppb level, to reach the current leading level of instrument accuracy, after a more stringent test to ensure the safety of customers' life and property.